Micromachined Ultra-Miniature Ion Source and Mass Spectrometer

Developed a new paradigm for the design of mass spectrometers by creating a revolutionary pseudo-random ion source array. Both surface and edge emitting arrays are fabricated using low-cost MEMS micromachining techniques.

Researchers

• Tai-Chang Chen

Research Areas

• Electronic, Photonic, and Integrated Quantum Systems (EPIQS)